Microsensors: Principles and Applications Book PDF, ePub eBook

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Book Descriptions:
The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors—the processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array devices. Features numerous examples.

Microsensors: Principles and Applications by Julian W. Gardner

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